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Glass Wafer & Through Glass Via

Glass Wafer · TGV Substrates
Core Materials for Chip Packaging

From precision glass wafer processing to TGV substrates, SEMI-compliant and built for 5G/6G RF modules, AI packaging (CoWoS/HBM), and MEMS sensors — with one-stop optical coating included.

6"–12"
Precision Glass Wafers
Three Size Options
<0.5μm
TTV Precision (6")
SEMI Standard
30–150μm
TGV Via Diameter
Custom Sizes
<6
Dielectric Constant
Low-Loss Substrate
Precision Glass Wafer / TGV Substrate

Four Core Technology Services

From glass substrate processing to functional coatings, delivering complete solutions for the semiconductor and optoelectronics industries.

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Glass Wafer Processing

Supplying 6", 8", and 12" precision glass wafers with TTV < 0.5μm (6") and surface roughness Ra < 0.3nm, fully compliant with SEMI semiconductor manufacturing standards.

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TGV Glass Substrates

Through Glass Via technology with via diameters of 30–150μm and a dielectric constant < 6, suitable for 5G/6G RF front-ends, AI CoWoS/HBM packaging, and MEMS sensors.

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Specialty Optical Glass

A wide range of specialty optical glass materials, including ultra-thin Carrier Glass support substrates, piezoelectric synthetic quartz, and Blue Glass IR-cut filters.

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Optical Coating Services

One-stop functional coating services including anti-reflective (AR) coatings, ITO/FTO transparent conductive films, metal sputtering (Cr/Au/Al), and multilayer dielectric coatings.

TGV Glass Substrates
Next-Generation Packaging Interconnects

Through Glass Via (TGV) replaces traditional silicon substrates with low-loss glass, delivering superior electrical insulation, lower dielectric loss, and higher integration density. As demand surges for 5G mmWave, AI high-performance computing packaging, and MEMS sensors, TGV is becoming an essential material for advanced packaging.

  • Via Diameter30 – 150 μm
  • Via Pitch50 – 500 μm
  • Substrate Thickness0.1 – 0.7 mm
  • Dielectric Constant (1GHz)< 6
  • Coefficient of Thermal Expansion (CTE)3 – 7 ppm/°C
  • Key Applications5G/6G · AI Packaging · MEMS
Precision Glass Wafer / TGV Substrate

Complete Specification Comparison

Covering full technical specifications for both glass wafer processing and TGV substrates, with customization available on request.

Specification 6" Glass Wafer 8" Glass Wafer 12" Glass Wafer
Wafer Diameter 150 mm 200 mm 300 mm
TTV Precision < 0.5 μm < 0.8 μm < 0.8 μm
Processable Thickness 0.1 – 2.0 mm
Surface Roughness (Ra) < 0.3 nm (polished surface)
Available Materials Alkali-free borosilicate glass / Quartz glass / BK7 optical glass / Specialty optical glass
Compliant Standards SEMI M1・M20・M78
Specification TGV Glass Substrate Notes
Via Diameter 30 – 150 μm Customizable by application
Via Pitch 50 – 500 μm Smaller pitch achievable with high-density arrays
Substrate Thickness 0.1 – 0.7 mm Ultra-thin down to 100 μm
Dielectric Constant (1 GHz) < 6 Low-loss, outperforming organic substrates
Coefficient of Thermal Expansion (CTE) 3 – 7 ppm/°C Close to silicon's CTE, reducing warpage
Warpage Control Ultra-low warpage design Suitable for back-end thinning processes
Key Applications 5G RF Modules · AI HBM Packaging · MEMS —

Two Partnership Models

Choose the partnership model that best fits your application — from sample development to full-scale production, we support it all.

★ Flagship Solution

TGV Glass Substrates
Custom Development

Design development and volume supply of TGV substrates for high-end applications including 5G/6G RF modules, AI CoWoS/HBM packaging, and MEMS sensors.

  • Fully customizable via diameters from 30–150μm
  • Low-loss dielectric constant < 6
  • Ultra-low warpage, thinnable down to 100μm
  • Compatible with AI CoWoS / HBM packaging requirements
  • SEMI-compliant, with complete documentation provided
Contract Manufacturing

Precision Glass Wafer
Contract Processing

One-stop processing for 6", 8", and 12" precision glass wafers — from dicing, grinding, and polishing to functional coatings — covering the full process chain for semiconductor and optoelectronic applications.

  • Ultra-high precision, TTV < 0.5μm (6")
  • Surface roughness Ra < 0.3 nm
  • Multiple glass materials: alkali-free, quartz, BK7
  • Integrated optical coatings (AR/ITO/metal sputtering)
  • From small-batch samples to full-scale mass production

Where It's Used

From advanced semiconductor packaging to precision optical instruments, supporting a wide range of high-tech manufacturing needs.

5G/AI advanced packaging application
5G/6G · AI Advanced Packaging

TGV substrates are used in 5G mmWave RF front-end modules (RFFE), CoWoS packaging for AI accelerators, and high-bandwidth memory (HBM), meeting the demands of high-density interconnects and low-loss transmission — a key material for AI computing infrastructure.

MEMS, precision optics, medical, and aerospace application
MEMS · Precision Optics · Medical & Aerospace

Precision glass wafers are widely used in MEMS pressure sensors, gyroscopes, camera lens optical components, medical diagnostic instruments, and aerospace sensing systems — maintaining high reliability even under extreme heat, pressure, and vibration.

Specialty Optical Glass Processing

Custom processing services for Carrier Glass, piezoelectric materials, Blue Glass, and a wide range of optical glass types.

Carrier Glass Wafer
📷 Carrier Glass
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Carrier Glass(NEW)
Glass Carrier Wafer for Thin Wafer Handling

Supports ultra-thin wafers (≤150μm) during thinning, coating, and etching processes to prevent breakage — cleanable and reusable afterward to reduce production costs.

Specifications
Available Sizes6" / 8" / 12"
MaterialFused Silica / BF33
Thickness500μm – 775μm
TTV≤1μm (premium) / ≤2μm
SurfaceDSP double-side polished, Ra ≤0.5nm
Heat ResistanceFused Silica >1000°C
Piezoelectric material
📷 Piezoelectric Material
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Piezoelectric Components
Piezoelectric Material

Made from synthetic quartz and available in plano, plano-convex, and bi-convex cut forms, suitable for high-reliability applications in aerospace, telecom base stations, and satellites.

Specifications
MaterialSynthetic Quartz
Sizeφ4.5–φ14mm / 1.8×3–30×30mm
Frequency5MHz (O3) – 120MHz (O5)
Cut TypePlano / Plano-convex / Bi-convex / Doubly rotated cut
Blue Glass IR Cut Filter
📷 Blue Glass
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Blue Glass(IR Cut Filter)
IR Absorbing Filter / Blue Glass

Blocks infrared light above 700nm to ensure accurate color reproduction on CMOS sensors, widely used in smartphone camera modules, automotive lenses, and security surveillance.

Specifications
MaterialSCHOTT BG / CDGM QB / NEG
Size77×77mm (standard)
Thickness0.11 / 0.145 / 0.21 / 0.3mm
Cutoff Wavelength>700nm IR blocking
Other optical glass
📷 Other Optical Glass
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Other Optical Glass
Other Optical Glasses

Precision cutting, grinding, and polishing services for optical glass from multiple leading brands, covering applications from camera lenses to medical instruments.

MaterialApplication
SCHOTT B270 / D263THigh-transmission optics
JGS1 (Fused Silica)UV optics
OHARA SeriesCamera, medical
CORNING Eagle XGTFT-LCD substrates
φ8–φ400mm 0.07–15.0mm
Quality Assurance

Quality Inspection Equipment

Equipped with professional optical measurement instruments to ensure every glass substrate meets the strictest quality standards in the semiconductor and optics industries.

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TTV (Total Thickness Variation) Measurement
Zygo Interferometer
Measurement ItemTotal Thickness Variation
Measurement Precision0.1 μm
Max Measurement SizeD300mm
TTV measurement equipment
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Flatness Measurement (Warp / Bow)
Interferometer
Measurement ItemWarp / Bow
Measurement Precision0.1 μm
Max Measurement SizeD300mm
Flatness measurement equipment
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Surface Roughness Measurement
Veeco White Light Interferometer
Measurement ItemRa Surface Roughness
Measurement Precision0.01 μm
Spec StandardRa ≤ 0.5nm
Surface roughness measurement equipment
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Particle & Dust Inspection
Optical Particle Counter
Measurement ItemSurface particle size
Measurement Precision0.1 μm
Applicable ToGlass Wafer / Carrier Glass
Particle and dust inspection equipment

Optical Coating Services

A range of coating processes tailored to functional needs, comprehensively enhancing the optical and electrical performance of glass substrates.

Optical

Anti-Reflective Coating (AR Coating)

Reduces surface reflectance to < 0.5%, significantly boosting light transmission — used in camera lenses, sensor windows, and display protective glass.

Conductive

ITO / FTO Transparent Conductive Coating

Transparent conductive oxide films with adjustable sheet resistance from 10–200 Ω/□, used in touch panels, solar cells, and electrically heated defogging glass.

Metal

Metal Sputtering (Cr / Au / Al)

High-adhesion metal films for electrode layers, masking layers, or heat-dissipation layers, widely used in MEMS microfabrication and semiconductor wafer processes.

Multilayer

Dielectric Multilayer Coatings

Alternating stacks of high- and low-refractive-index materials produce precision optical components such as bandpass filters, high-reflectivity mirrors, and beam splitters, with customizable wavelength ranges.

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